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Continue to ChatEffect of heat treatment on the stress and structure evolution of plasma deposited boron nitride thin films - https://avesis.metu.edu.tr/yayin/ded38058-d383-45dd-b60c-5639d88caf61/effect-of-heat-treatment-on-the-stress-and-structure-evolution-of-plasma-deposited-boron-nitride-thin-films